Identify the laser source in your KLA system
Start with the tool model you know, then confirm the installed laser-source label. This route covers source-level and related-component assessment, not complete KLA inspection-tool servicing.
KLA Platform Coverage
KLA families and models available here.
Choose the KLA family or device page that matches the platform you are working with. If you only know the model name, go straight to the device page.
Puma
Choose the installed Puma model. Any laser-source reference must be checked against your equipment label or service records.
SP
SP2 and SP5 are available as dedicated model pages. If you know the tool model but not every laser detail, these pages are the right place to start.
Voyager
If only the Voyager family is known, include the available labels and source information. The exact configuration and service scope still need confirmation.
Source reference to verifyCryLaS FQCW 266-500, only if confirmed from the installed label
How Reviews Start
Most KLA requests enter from the tool model first.
For KLA-linked cases, the fastest route is usually to confirm the tool family, visible model name, and current operating behavior before trying to map every source-side detail.
Start from Puma, SP, or another visible family
Equipment family and model labels are usually the clearest public identifiers and help place the case on the right support path quickly.
Explain drift, alarms, startup faults, or downtime
Short notes on how the system is behaving now are often enough to narrow whether the case needs bench repair, source review, or replacement planning.
Move to the matching model page or submit an RFQ
If the model is already known, open that model page directly. If not, send the KLA platform name, visible labels, and current symptoms so the review can start without delay.
Inquiry Guidance
Start with the platform, the model, and the current symptoms.
You do not need complete laser-source information before contacting us. A KLA platform reference, the equipment model, and clear fault notes are enough to begin review.
Platform, family, model, labels
These details help narrow the section quickly and make it easier to validate any paired laser reference when it is relevant.
Equipment photos and alarm details
Photos of labels, laser sections, and alarm behavior usually accelerate both repair assessment and replacement-path decisions.
Before You Inquire
Separate the tool identity from the laser-source fault.
A platform name or alarm does not confirm the source configuration or a failed component. Use existing evidence to define the request.
Output changes, startup issues or alarms
Report what changed and when it happens. Crystal, pump-diode or circuit damage requires assessment and should not be assumed from a tool alarm.
Share the installed source label
References on model pages are identification aids. Confirm them against your own label or service records before considering a replacement.
Source-level assessment
Requests are reviewed for laser-source and related-component work. Broader tool faults may require the equipment service provider.
Next Action
Open the matching KLA model page if you already know the model name.
If the source model is unknown, send the labels and fault records you already have. Read the repair evaluation process before arranging further work or shipment.
- KLA platform or family name
- Visible equipment model
- Current fault or alarm state
- Laser-area photos if available
- Any paired laser reference already on file